Semiconductor production system

ABSTRACT

A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor inspection apparatus having an observation unit, a control unit for controlling the observation unit and a storage device; and a storage device commonly used by the semiconductor manufacturing apparatus and the semiconductor inspection apparatus. The manufacturing apparatus, the inspection apparatus and the commonly used storage device are interconnected via a storage area network. With the semiconductor manufacturing apparatus and the storage device linked together via the storage area network, a large volume of image data or design data can be communicated at high speed, thus improving the system throughput.

BACKGROUND OF THE INVENTION

The present invention relates to a semiconductor production system andmore particularly to a semiconductor production system linking asemiconductor manufacturing apparatus, an inspection apparatus and astorage device by using a storage area network.

A commonly used communication means for interconnecting apparatus is aLAN (local area network) described, for example, in Japanese PatentUnexamined Publication No. 2000-164667. Another system is also knownwhich, as disclosed in Japanese Patent Unexamined Publication No.9-153441 (corresponding to U.S. Pat. No. 5,867,389), divides a LAN intoa plurality of segments and installs a processing station between thedivided segments to copy data.

The storage area network is an independent network which is constructedof only storages, devices for storing data, by separating the storagesfrom a server. Examples of such storage area networks include thosenetworks based on such links as a fiber channel (one of serial interfacestandards) described in WO 00/18049 and WO 00/17769 and an optical fiberdescribed in WO 00/2954. The storage area network is a general term fornetworks that link storage devices independently of the kind ofcommunication devices used. A link of storage devices through a serialbus as defined in IEEE1394 and a link of storage devices through aswitched bus as defined by InfiniBand (registered trade name) arestorage area networks. However, Ethernet which handles storage protocol,such as iSCSI (registered trade name) and SEP (SCSI EncapsulationProtocol), is the storage area networks.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a semiconductorproduction system capable of transferring at high speed and storing alarge volume of image data or design data.

Another object of the present invention is provide a semiconductorproduction system capable of linking various information in thesemiconductor production system via network to improve systemthroughput.

In the conventional technologies described above, because two kinds ofdata, namely a large volume of CAD data representing design informationon semiconductors and semiconductor masks and message data representingcontrol commands for controlling and linking a variety of devices aretransferred on the same network without considering the kind of dataflowing through the network, traffic inevitably increases, degrading theperformance of the network, which in turn adversely affects the overallperformance of the system. That is, the conventional networks have aproblem that the throughput of the networks changes according to thefrequency of issuing the control command, the frequency of generating aresponse to the command and the transmission/reception of a large volumeof data such as image data, thus degrading the overall performance ofthe apparatus. As the advance of the micro-fabrication technology inparticular drastically increases the volumes of the image data obtainedas a result of inspection and of the CAD data representing the designinformation on semiconductors and masks, the band of the network isoccupied by simply communicating these data. This adversely affects thetransmission and reception of message data.

There is a technique that divides a LAN into a plurality of segments andinstalls processing stations between the segments to perform copying ofdata to alleviate the traffic. In this case, however, because theprocessing stations copy data between the segments, the processingstations themselves become a bottleneck of the overall performance ofthe system. For example, if the inspection apparatus and manufacturingapparatus are connected together via network, data must be copied vianetwork in order to transfer data between these apparatus, thus crowdingthe network and lowering the throughput of the system as a whole.Further, it is also necessary to copy data between storage devicesconnected to individual segments and this makes the consistencymanagement of copied data complicated.

The present invention has been accomplished in light of theabove-described problems.

To solve the problems above, the present invention adopts the followingmeans.

A semiconductor production system comprises: a semiconductormanufacturing apparatus having an exposure unit, a control unit forcontrolling the exposure unit and a storage device; a semiconductorinspection apparatus having an observation unit, a control unit forcontrolling the observation unit and a storage device; and a storagedevice commonly used by the semiconductor manufacturing apparatus andthe semiconductor inspection apparatus; wherein the semiconductormanufacturing apparatus, the semiconductor inspection apparatus and thecommonly used storage device are linked together via a storage areanetwork. The semiconductor manufacturing apparatus can be used as anapparatus for making masks for fabricating semiconductors.

As described above, with this invention because the semiconductormanufacturing apparatus or storage devices are linked together via thestorage area network, a large volume of image data or design data can betransferred at high speed, improving the system throughput.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram showing a configuration of a semiconductorproduction system as one embodiment of the invention.

FIG. 2 is a block diagram showing another configuration of thesemiconductor production system.

FIG. 3 is a block diagram showing still another configuration of thesemiconductor production system.

FIG. 4 is a block diagram showing a further configuration of thesemiconductor production system.

FIG. 5 is a block diagram showing a further configuration of thesemiconductor production system.

FIG. 6 is a diagram showing a sequence of operations by which asemiconductor manufacturing apparatus generates an inspection positionand a semiconductor inspection apparatus executes an inspection.

FIG. 7 is a diagram showing a sequence by which the semiconductorinspection apparatus generates an inspection position and executes aninspection.

FIG. 8 is a diagram showing a sequence by which a computer connected toa storage area network generates an inspection position and thesemiconductor inspection apparatus executes an inspection.

FIG. 9 is a diagram showing a sequence for generating an inspectionposition based on information on divided areas of design information.

FIG. 10 is a diagram showing a sequence for generating an inspectionposition based on information on multiple processing caused by designinformation division.

FIG. 11 is a diagram showing a sequence for generating an inspectionposition based on information on correction processing.

FIG. 12 is a diagram showing a sequence for identifying a logiccorresponding to a faulty position based on information on the faultyposition found by the inspection apparatus.

FIG. 13 is a diagram showing an example that simultaneously displaysinspection images of faulty positions.

FIG. 14 is a diagram showing an example that displays link data forretrieving a variety of information associated with semiconductormanufacturing.

FIG. 15 is a diagram showing an example in which a variety ofinformation is stored in a physically single storage device.

FIG. 16 is a diagram showing an example in which a variety ofinformation is stored in physically different storage devices.

FIG. 17 is a diagram showing an example in which only the link data isstored independently.

FIG. 18 is a diagram showing an example table which records acorrelation between an allowable range, an inspection result and aperformance of a final product in the inspection apparatus.

FIG. 19 is a diagram showing a sequence for estimating a performancefrom the inspection result.

FIG. 20 is a diagram showing an overall configuration of thesemiconductor inspection apparatus.

FIG. 21 is a block diagram showing a semiconductor inspection apparatuswith its control unit connected to the storage area network.

FIG. 22 is a block diagram showing a semiconductor inspection apparatuswith a plurality of inspection processing apparatus connected to thestorage area network.

FIG. 23 is a block diagram showing a semiconductor inspection apparatuswhen a fiber channel is employed as the storage area network.

FIG. 24 is a block diagram showing an overall configuration of asemiconductor manufacturing apparatus.

FIG. 25 is a block diagram showing a semiconductor manufacturingapparatus with its control unit connected to the storage area network.

FIG. 26 is a block diagram showing a semiconductor manufacturingapparatus with a plurality of design information processing apparatusconnected to the storage area network.

FIG. 27 is a block diagram showing a plurality of semiconductormanufacturing apparatus connected to the storage area network.

FIG. 28 is a diagram showing a semiconductor manufacturing apparatuswhen a fiber channel is used as the storage area network and dedicatedhardware is mounted in its control unit.

FIG. 29 is a diagram showing a sequence for seeking accuracy ofmanufacturing process by comparing shot information stored in a storagedevice with design information on which the shot information is based.

FIG. 30 is a diagram showing a sequence for estimating a processing timetaken by the semiconductor manufacturing apparatus.

FIG. 31 is a diagram showing a sequence for displaying a presentprocessing position of the semiconductor manufacturing apparatus.

FIG. 32 is a diagram showing an example screen displaying a presentprocessing position of the semiconductor manufacturing apparatus.

DESCRIPTION OF THE EMBODIMENTS

Embodiments of the present invention will be described by referring toFIG. 1 to FIG. 32. FIG. 1 is a block diagram showing a semiconductorproduction system as one embodiment of the present invention.

As shown in the figure, a storage area network 40 interconnects asemiconductor inspection apparatus 10, a semiconductor manufacturingapparatus 20 and a storage device 30. The semiconductor inspectionapparatus 10 and the semiconductor manufacturing apparatus 20 can alsobe interconnected via a general network 50. In this embodiment, theprovision of the storage area network 40 achieves a large-capacity datacommunication between the semiconductor inspection apparatus 10 and thesemiconductor manufacturing apparatus 20 without affecting the generalnetwork 50. Because the storage device 30 is shared by the semiconductorinspection apparatus 10 and the semiconductor manufacturing apparatus20, data does not have to be copied between the apparatus, thusimproving the overall performance of the system and simplifying the datamanagement. It is noted that the manufacturing apparatus 20 can be usednot only for making semiconductors but also for making semiconductormasks and that the inspection apparatus 10 can be used not only forinspecting semiconductors but also for inspecting semiconductor masks.For the sake of simplicity, these apparatus will be explained as asemiconductor manufacturing apparatus and as a semiconductor inspectionapparatus in the following description.

FIG. 2 is a block diagram illustrating another configuration of thesemiconductor production system. As shown in the figure, the storagearea network 40 interconnects a semiconductor inspection apparatus 10, asemiconductor manufacturing apparatus 20 and a plurality of storagedevices 30. The storage area network 40 employs fiber channels 41 ascommunication devices and interconnects the fiber channels with a fabric42. The semiconductor inspection apparatus 10 and the semiconductormanufacturing apparatus 20 are linked together via the general network50.

In the fabric 42 there are switches and a hub, both of which support ahot plug. This allows additional storage devices 30 to be connecteddynamically to the storage area network 40 for extension. Because thefabric 42 allows a cascade connection, a further expansion is possible.

By connecting the fabrics using fiber channels, it is possible toarbitrarily select installation locations of the semiconductorinspection apparatus 10, the semiconductor manufacturing apparatus 20and the storage devices 30. For example, the semiconductor inspectionapparatus 10 and the semiconductor manufacturing apparatus 20 may beinstalled at a manufacturing site and the storage device 30 at an officeor data center. With this arrangement, if the manufacturing site is hitby a natural disaster, because all the information associated with thesemiconductor inspection apparatus 10 and the semiconductormanufacturing apparatus 20 installed at the manufacturing site is storedin the storage device 30, the recovery from damages will be easy. Theconfiguration using switches in the fabric 42 is identical to thoseusing the InfiniBand for the communication device. Hence, where there isno need for a long-distance communication through the fiber channels 41,the use of the InfiniBand can realize a compact system of the identicalconfiguration.

FIG. 3 is a block diagram showing still another configuration of thesemiconductor production system. As shown in the figure, the storagearea network 40 interconnects a semiconductor inspection apparatus 10, asemiconductor manufacturing apparatus 20 and a plurality of storagedevices 30. The storage area network 40 adopts fiber channels 41 as thecommunication device connecting the individual apparatus in loop. Thesemiconductor inspection apparatus 10 and the semiconductormanufacturing apparatus 20 are interconnected through the generalnetwork 50. This loop configuration does not require facilities such asfabrics but realizes a simple system that can be built only byconnecting fiber optics. This configuration facilitates maintenance andcan also achieve a system with duplicated loops easily.

FIG. 4 is a block diagram showing a further configuration of thesemiconductor production system. As shown in the figure, the storagearea network 40 interconnects a semiconductor inspection apparatus 10, asemiconductor manufacturing apparatus 20 and a plurality of storagedevices 30. The storage area network 40 connects them to thecommunication device in a tree topology according to the IEEE 1394-43.In this configuration, the inspection apparatus 10 or the manufacturingapparatus 20 is taken as a root of the tree. The semiconductorinspection apparatus 10 and the semiconductor manufacturing apparatus 20are connected together via the general network 50. The IEEE 1394supports the hot plug, so the storage devices can be dynamically addedto the storage area network for expansion.

FIG. 5 is a block diagram showing a further configuration of thesemiconductor production system. As shown in the figure, the storagearea network 40 interconnects a semiconductor inspection apparatus 10, asemiconductor manufacturing apparatus 20, a plurality of storage devices30 and a computer 60. The semiconductor inspection apparatus 10, thesemiconductor manufacturing apparatus 20 and the computer 60 are linkedtogether via the general network 50. In this embodiment, the provisionof the storage area network 40 realizes a large-capacity datacommunication between the semiconductor inspection apparatus 10, thesemiconductor manufacturing apparatus 20 and the computer 60 withoutaffecting the general network 50. The storage device storing dataproduced in an upstream process such as logic design and the storagedevice storing data produced in an inspection and manufacturing processhave conventionally been separated, so that transfer of informationbetween the two processes is difficult to achieve. With this embodiment,however, there is no need to copy data since the storage devices 30 areshared. This improves the overall performance of the system andsimplifies the data management. Further, if a storage area network 40 isselected which can perform a long-distance communication, theinstallation locations of the semiconductor inspection apparatus 10, thesemiconductor manufacturing apparatus 20 and the computer 60 can be setwith flexibility.

FIG. 6 to FIG. 8 are diagrams showing inspection processing. FIG. 6illustrates a sequence of operations by which the semiconductormanufacturing apparatus generates an inspection position and thesemiconductor inspection apparatus executes an inspection accordingly.The manufacturing apparatus 20 first reads design information from thestorage device 30 (S10). Next, based on the design information read out,the manufacturing apparatus generates an inspection position orinspection area (S20). Then it writes the generated inspection positioninto the storage device 30 (S30). The written information serves as alog indicating the execution of the processing. Next, the inspectionapparatus 10 reads the inspection position from the storage device 30(S40) and executes an inspection according to the inspection positionretrieved (S50). By specifying the inspection position from a deviceexternal to the inspection apparatus 10 in this way, the load of theinspection apparatus can be alleviated to improve the performance of theinspection apparatus.

FIG. 7 illustrates a sequence of operations by which the semiconductorinspection apparatus generates an inspection position and executes aninspection accordingly. First, the inspection apparatus 10 reads designinformation from the storage device 30 (S100) and, based on the designinformation read out, generates an inspection position or inspectionarea (S110). Then, it writes the generated inspection position into thestorage device 30 (S120). The written information serves as a logindicating the execution of the processing. Next, the inspectionapparatus reads the inspection position from the storage device 30(S130) and executes an inspection according to the inspection positionretrieved (S140). By generating the inspection position internally ofthe inspection apparatus 10 in this manner, the load of other than theinspection apparatus can be alleviated.

FIG. 8 illustrates a sequence of operations by which the computerconnected to the storage area network generates an inspection positionand the semiconductor inspection apparatus executes an inspectionaccordingly. First, the computer 60 reads design information from thestorage device 30 (S200). Then, based on the design information readout, the computer 60 generates an inspection position or inspection area(S210). Next, it writes the generated inspection position into thestorage device 30 (S220). The written information serves as a logindicating the execution of the processing. Next, the inspectionapparatus 10 retrieves the inspection position from the storage device30 (S230) and executes an inspection according to the retrieved position(S240). Specifying the inspection position from a device external to theinspection apparatus 10 in this manner can reduce the load of theinspection apparatus and improve its performance.

Because the generation of an inspection position can be made either bythe inspection apparatus 10, the manufacturing apparatus 20 or thecomputer 60 separate from the two apparatus, as described above, it ispossible to deal flexibly with the states of load of these apparatus andwith any change in the inspection position generation method.

FIG. 9 and FIG. 10 illustrate operation sequences for generating aninspection position. FIG. 9 shows a sequence for generating aninspection position based on information on divided areas of the designinformation. While the inspection position can be generated either bythe inspection apparatus 10, the manufacturing apparatus or the computer60, as shown in FIGS. 6, 7 and 8, this embodiment uses the manufacturingapparatus 20 in generating the inspection position.

First, the manufacturing apparatus 20 reads design information 71 fromthe storage device 30 (S400). Next, because many manufacturing apparatus20 cannot process an entire area of the retrieved design information atone time, the design information is divided into, for example, stripesof divided information 72 (S410). Next, the manufacturing apparatus 20extracts divided areas 73 including the boundaries between the dividedinformation 72 (S420). There is a possibility that the divided areas 73may include semiconductor cells that should have not been divided, suchas transistors or other devices. Then, the divided cells are picked up(S430). Next, after the divided cells are extracted, the positions orareas of the divided cells are determined. From the divided cells areprepared a list of inspection positions which is then written into thestorage device 30 (S440). By taking as inspection positions thoseportions that are likely to be affected by the division, the number ofinspection positions can be reduced, improving the overall performanceof the system.

FIG. 10 illustrates a sequence of operations for generating aninspection position based on information on multiple processing causedby design information division. As in FIG. 9, this sequence will beexplained in an example case where the manufacturing apparatus 20performs the sequence. First, the manufacturing apparatus 20 reads thedesign information 71 from the storage device 30 (S500). Manymanufacturing apparatus 20 cannot process the entire area of the designinformation at one time, so the design information is divided into, forexample, stripes of divided information 72 (S510). Next, divided areas73 including boundaries of the divided information are extracted (S520).The divided areas 73 may include wires that should not have beendivided. Because the divided wires are finally reconnected, the dividedwires are often processed multiple times based on the information onthose portions straddling the division. Therefore, the portions that aresubject to multiple processing are extracted based on the divided wires(S530). Next, after the portions subject to multiple processing areextracted, the positions or areas of the divided wires are determinedfrom the design information 71. From these positions a list ofinspection positions is prepared which is then written into the storagedevice 30 (S540). By taking as inspection positions those portions thatare likely to be affected by the multiple processing, it is possible toreduce the number of inspection positions and thereby improve theoverall performance of the system.

FIG. 11 shows a sequence of operations for generating an inspectionposition based on correction processing information. As in FIG. 9, thissequence will be explained in an example case where the manufacturingapparatus 20 executes the sequence. First, the manufacturing apparatus20 reads design information 71 from the storage device 30 (S600). In themanufacturing apparatus 20 such as EB (electron beam direct writingsystem), a physical phenomenon such as refraction occurs due to theproximity effect of electron beams and therefore the writing result isnot what is intended by the design information 71 even when the electronbeam exposure is performed according to the design information. To dealwith this problem Optical Proximity Correction (OPC) is carried out.There are two types of OPC, one based on rule and one based onsimulation. This invention is not limited to a particular OPC method.Performing the OPC generates information 77 that incorporates acorrection pattern (S610). Because the design information is oftengeometric data, the correction pattern can be determined by performinggeometric logic calculations on both the original design information 71and the information 77 incorporating the correction pattern. When thecorrection pattern is obtained, the position or area can be determinedfrom the design information 71. The positions thus obtained are writteninto the storage device 30 in the form of a list of inspection positions(S630). By taking as inspection positions those portions that are likelyto be affected by the correction processing, it is possible to reducethe number of inspection positions and thus improve the overallperformance of the system.

FIG. 12 shows a sequence of operations for identifying a logiccorresponding to a faulty position based on information on the faultyposition detected by the inspection apparatus. First, the inspectionapparatus 10 reads a faulty position written into the storage device 30(S700). Based on the faulty position, the inspection apparatus 10extracts the corresponding position of layout information (S710). Itthen extracts cells such as transistors based on the extracted layoutinformation (S720). The above steps are identical to the LVS (layoutversus schematic) that is executed by the existing layout verificationtool.

Next, a wire connected to the extracted cell is traced (S730). The samepattern as the traced pattern is searched from the logic informationsuch as net list (S740). The logic information such as the net listincluding the searched logic is extracted (S750).

In this embodiment an inspection can be performed retroactively from thelogic generation step or upstream step in the semiconductormanufacturing process. This makes it possible to decide whether thefailure can be alleviated by changing the logic, thus improving theyield.

FIG. 13 shows an example case in which a screen displays an inspectionimage of a faulty location, layout information on the faulty location,cell library information, cell device information, logic symbols and alogic description at one time. In the figure, a screen simultaneouslydisplays an actual image 100 observed by the inspection apparatus 10,layout information 110 corresponding to the actual image, cell libraryinformation 120 present at the layout position, device information 130in the cell library, a logic 140 corresponding to the device, and alogic description 150 by which the logic is formed.

There has been a technique which inspects a failure by displaying theinspection image and the layout information in a superimposed state. Theconventional technique, however, can only make decisions on failures insuch a way that impurities spanning the wires are considered as faultyand that impurities not spanning the wires are considered not faulty. Onthe other hand the present invention displays the logic information too,so if a wire failure is associated with a clock, for example, this isconsidered to have grave effects on the system as a whole and is decidedto be a failure. In this way the decision on failure can be increased inseverity.

FIG. 14 shows an example case in which individual kinds of informationassociated with the semiconductor manufacturing are provided with linkdata. In this embodiment, link data 200 is used which links a storagedevice ID for identifying a storage device 30 with an ID of theinformation itself. That is, the link data 200 is added to individualkinds of information so that requirement specification information 210,function specification information 220, logic information 230, cellinformation 240, layout information 250, mask/reticle information 260,writing information 270, and inspection result 280 can be associatedwith one another by the link data 200. Matching such link directionswith an actual manufacturing process allows the information link to beutilized as the log information in the manufacturing process.

FIG. 15 shows an example case in which different kinds of informationare stored in a physically single storage device. As shown in thefigure, the requirement specification information 210, the functionspecification information 220, the logic information 230, the cellinformation 240, the layout information 250, the mask/reticleinformation 260, the writing information 270 and the inspection result280 are stored in one storage device 30. By storing all kinds ofinformation in one storage device 30, desired information can beaccessed quickly by tracing the link data 200.

FIG. 16 shows an example case where different kinds of information arestored in physically different storage devices. As shown in the figure,the requirement specification information 210, the functionspecification information 220, the logic information 230, the cellinformation 240, the layout information 250, the mask/reticleinformation 260, the writing information 270 and the inspection result280 are each stored in different storage devices 30. Storing differentkinds of information in different storage devices 30 can minimize apossible damage to the storage device 30 when compared with the storageconfiguration shown in FIG. 15.

FIG. 17 shows an example case where only the link data is independentlystored. Requirement specification information link data 310, functionspecification information link data 320, logic information link data330, cell information link data 340, layout information link data 350,mask/reticle information link data 360, writing information link data370 and inspection result link data 380 are collected as an independentlink list to enable a faster access to desired information than with thesearch through the unidirection list of FIG. 14.

FIG. 18 shows an example table that records a correlation among anallowable range in inspection, an inspection result and a performance ofa final product. A correlation table 400 stores an allowable range 410specified during the inspection, an actually measured value 420 withinthe specified range, and a final performance of a product with theactually measured value 420, such as a clock frequency. Theabove-described items can be sorted and the actually measured values canbe classified into regions by performance level.

FIG. 19 shows a sequence for estimating a performance from theinspection result. First, the inspection apparatus 10 reads a measuredvalue written into the storage device 30 (S800) and, based on themeasured value thus read out, searches through the correlation table 400(S810). When the search result produces data that matches the measuredvalue 420, the inspection apparatus 10 reads a performance value 430corresponding to the data (S820). If no data matching the measured value420 is found, then a search is made in positive and negative directionsto find data close to the measured value 420 and retrieve twoapproximate values (S830). Performance values 430 corresponding to theseapproximate values are determined to calculate a performance value byinterpolation (S840). By estimating the performance from the inspectionresult of the inspection apparatus 10 in this way, the performance canbe estimated during the inspection process without actually evaluatingthe performance of the semiconductor product.

FIG. 20 to FIG. 23 are block diagrams showing semiconductor inspectionapparatus as embodiments of the present invention. FIG. 20 is a blockdiagram showing an overall configuration. As shown in the figure, theinspection apparatus 10 comprises an observation unit 12 having anoptical image sensing device and others and a control unit 14 forcontrolling the observation unit. The observation unit 12 and thecontrol unit 14 are connected through the storage area network 40 to astorage device 30 outside the inspection apparatus, a storage device 31inside the inspection apparatus 10, and an apparatus 60 other than theinspection apparatus. This configuration allows the storage devices tobe shared among various apparatus.

FIG. 21 is a block diagram showing a semiconductor inspection apparatuswith its control unit connected to the storage area network. As shown inthe figure, the inspection apparatus 10 comprises an observation unit 12having an optical image sensing device and others and a control unit 14for controlling the observation unit. The control unit 14 is connectedthrough the storage area network 40 to a storage device 30 outside theinspection apparatus, a storage device 31 inside the inspectionapparatus, and an apparatus 60 other than the inspection apparatus. Thisconfiguration allows the control unit to access all the storage devicesinside or outside the apparatus.

FIG. 22 is a block diagram showing a semiconductor inspection apparatuswith a plurality of inspection processing appratus connected to thestorage area network. As shown in the figure, the inspection apparatus10 comprises an observation unit 12 having an optical image sensingdevice and others and a control unit 14 for controlling the observationunit. The observation unit 12 and the control unit 14 are connectedthrough the storage area network 40 to a storage device 30 outside theinspection apparatus, a storage device 31 inside the inspectionapparatus, and a plurality of inspection processing apparatus 60. Inthis configuration, when image data obtained by the inspection apparatus10 is stored in the external storage device 30, a plurality ofinspection processing apparatus 60 can easily access the image datastored in the storage device 30, making it possible to easily realizeparallel inspection processing and thereby improve the overallperformance of the system. Further, because an inspection processingapparatus 60 can be added to or removed from the storage area network 40while the system is in operation, the configuration of the inspectionprocessing apparatus 60 can be modified according to variations in thesystem load.

FIG. 23 is a block diagram showing a semiconductor inspection apparatuswhen a fiber channel is employed as the storage area network. As shownin the figure, inspection apparatus 10 comprises an observation unit 12having an optical image sensing device and others and a control unit 14for controlling the observation unit. The observation unit 12 and thecontrol unit 14 are connected through the storage area network 40 to astorage device 30 outside the inspection apparatus, a storage device 31inside the inspection apparatus, and a plurality of inspectionprocessing apparatus 60. The storage area network 40 has a plurality offabrics 42, to each of which the units and apparatus are connected viafiber channels 41. The fabrics 42 are interconnected also by a fiberchannel 43. In this case, when the connections 43 between a plurality offabrics are replaced with WAN such as ATM, the inspection apparatus maybe installed in a clean room at the manufacturing site and theinspection processing apparatus in a remote office.

FIG. 24 and FIG. 25 are block diagrams showing semiconductormanufacturing apparatus as embodiments of this invention. FIG. 24 is ablock diagram showing an overall configuration of the system. As shownin the figure, the manufacturing apparatus 20 comprises an exposure unit22 having an optical exposure means or charged particle exposure means,and a control unit 24 for controlling the exposure unit. The exposureunit 22 and the control unit 24 are connected through the storage areanetwork 40 to a storage device 30 outside the manufacturing apparatus, astorage device 32 inside the manufacturing apparatus, and an apparatus60 other than the manufacturing apparatus 20. This configuration allowsthe storage devices to be shared among the units and apparatus.

FIG. 25 is a block diagram showing a semiconductor manufacturingapparatus with its control unit connected to the storage area network.As shown in the figure, the manufacturing apparatus 20 comprises anexposure unit 22 having an optical exposure means or charged particleexposure means, and a control unit 24 for controlling the exposure unit.The control unit 24 is connected through the storage area network 40 toa storage device 30 outside the manufacturing apparatus, a storagedevice 32 inside the manufacturing apparatus, and an apparatus 60 otherthan the manufacturing apparatus 20. This configuration allows thecontrol unit to access all the storage devices inside or outside themanufacturing apparatus.

FIG. 26 is a block diagram showing a semiconductor inspection apparatuswith a plurality of design information processing apparatus 60 connectedto the storage area network. As shown in the figure, the manufacturingapparatus 20 comprises an exposure unit 22 having an optical exposuremeans or charged particle exposure means, and a control unit 24 forcontrolling the exposure unit. The exposure unit 22 and the control unit24 are connected through the storage area network 40 to a storage device30 outside the manufacturing apparatus, a storage device 32 inside themanufacturing apparatus, and a plurality of design informationprocessing apparatus 60. With this configuration, because a plurality ofdesign information processing apparatus 60 can store in the storagedevice 30 design information processed for use in the manufacturingapparatus 20, the parallel manufacture processing can easily berealized, thus improving the overall performance of the system. A designinformation processing apparatus 60 can be added to or removed from thestorage area network while the system is in operation. Hence, when newdesign information processing is requested, an additional designinformation processing apparatus can be added without halting thesystem, thus improving the system extension capability.

FIG. 27 is a block diagram showing an example case where a plurality ofsemiconductor manufacturing apparatus are connected to the storage areanetwork. As shown in the figure, a plurality of manufacturing apparatus20 can access design information stored in the storage device 30 via thestorage area network. Therefore, for the same design information aplurality of manufacturing apparatus can parallelly execute themanufacturing process at the same time, improving the overallperformance of the system.

FIG. 28 is a block diagram showing a semiconductor manufacturingapparatus when a fiber channel is adopted for the storage area networkand a dedicated hardware is used for the control unit. As shown in thefigure, the manufacturing apparatus 20 comprises an exposure unit 22having an optical exposure means or charged particle exposure means, anda control unit 24 for controlling the exposure unit. The exposure unit22 and the control unit 24 are connected through the storage areanetwork 40 to a storage device 30 outside the manufacturing apparatus, astorage device 32 inside the manufacturing apparatus, and a plurality ofdesign information processing apparatus 60. The storage area network 40has a plurality of fabrics 42, to which various units and apparatus areconnected by fiber channels 41. The fabrics 42 are interconnected alsoby the fiber channel 43. The control unit 24 comprises a BM (buffermemory) 25 for temporarily storing design information, a recovery unit26 for processing the design information for use in the control unit 24,a dividing unit 27 for dividing the data processed by the recovery unit26 into minimum geometric units such as rectangles, a proximitycorrection unit 28 for executing a proximity effect correction on theminimum geometric units divided by the dividing unit, and a shot unit 29for converting the data into shot information conforming to the exposureunit 22.

The conventional control unit 24 implemented with hardware is a blackbox whose inner data cannot be accessed. With this embodiment, however,the data contained in the control unit 24 can be accessed via the fiberchannels. Hence, the correction result produced by the proximitycorrection unit 28 and the actual shot specification informationproduced by the shot unit 29 can be retrieved and, based on theseinformation, new functions can be provided.

FIG. 29 shows a sequence of operations for determining the accuracy ofthe manufacturing process by comparing the shot information stored inthe storage device with the design information from which the shotinformation has been derived. An example case where the sequence isapplied to the semiconductor manufacturing apparatus of FIG. 28 will beexplained.

First, the shot information stored in the storage device 30 or storagedevice 32 (S900) is read out and, based on the shot information readout, the writing pattern is recovered (S910). The shot information is aset of minimum geometric units such as rectangles and the writingpattern can be recovered by performing interpolation between the unitgeometries. Next, design information is read out (S920). The formats ofthe writing pattern and the design information are often CAD data orvector data and, when the format of the design information differs fromthat of the writing pattern, it needs to be converted. Then, the writingpattern and the design information are compared (S930). When they agree,it is decided that the processing has been executed accurately (S940).When they disagree, it is decided that the processing was not accurate(S950). When they disagree, the location of disagreement is stored inthe storage device 30 so that the stored information may be used ascontrol data for a micro-fabrication machine using FIB (focused ionbeam) which is connected to the storage area network 40.

FIG. 30 shows a sequence for estimating a processing time taken by thesemiconductor manufacturing apparatus. First, the shot information isread out from the storage device 30 (S1000). From the shot informationthus read out, the number of shots is measured (S1010). The shotinformation is a set of minimum geometric units such as rectangles, asdescribed above, and the total of the geometric units represents thenumber of shots. The number of shots measured is multiplied by a shotstandard time taken by each minimum geometric unit of the manufacturingapparatus (S1020). If there are two or more kinds of minimum geometricunits and the shot standard time differs from one geometric unit kind toanother, the number of shots is measured for each kind of minimumgeometric unit and is multiplied by the shot standard time of eachminimum geometric unit kind. The multiplied values are summed up toestimate an accurate processing time.

FIG. 31 shows a sequence for displaying the present processing positionof the semiconductor manufacturing apparatus. First, present shotinformation is read out from the storage device 30 (S1100). From theshot information read out, shot position information is retrieved(S1110). Next, design information is retrieved from the storage device30 (S1120). Then, the design information and the shot positioninformation are combined (S1130). The resultant total is displayed(S1140).

FIG. 32 shows an example screen that displays the present processingposition of the semiconductor manufacturing apparatus. As shown in thefigure, a display screen 500 displays a layout writing pattern 510,which is design information, and shot information 520. For the layoutwriting area, the shot position is a very fine area. In order tovisualize the areas of shot information on the display screen 500,therefore, an area including the shot position in the area 530 displayedon the screen may be displayed magnified.

This invention discloses the following:

(1) A semiconductor production system comprising:

a semiconductor manufacturing apparatus having an exposure unit, acontrol unit for controlling the exposure unit and a storage device;

a semiconductor inspection apparatus having an observation unit, acontrol unit for controlling the observation unit and a storage device;

a storage device commonly used by the semiconductor manufacturingapparatus and the semiconductor inspection apparatus; and

a storage area network for interconnecting the semiconductormanufacturing apparatus, the semiconductor inspection apparatus and thecommonly used storage device.

(2) The semiconductor production system according to item (1), whereinthe storage area network has a plurality of fabrics for switching fiberchannels.

(3) The semiconductor production system according to any one of items(1) to (2), wherein the commonly used storage device stores image dataand design data.

(4) The semiconductor production system according to any one of items(1) to (3), wherein the semiconductor manufacturing apparatusmanufactures semiconductors or masks for fabricating the semiconductors.

(5) The semiconductor production system according to any one of items(1) to (4), wherein, based on the design data, the semiconductormanufacturing apparatus generates information on an inspection positionat which the semiconductor inspection apparatus performs inspection.

(6) The semiconductor production system according to any one of items(1) to (5), wherein the semiconductor manufacturing apparatus has ameans for calculating accuracy of a manufacturing process by comparingthe design data with shot information, the shot information representinga writing pattern generated based on the design data.

(7) The semiconductor production system according to any one of items(1) to (6), wherein the semiconductor inspection apparatus executes aninspection based on inspection position information generated by thesemiconductor manufacturing apparatus or inspection position informationgenerated by itself, and generates failure position informationrepresenting a failure position.

(8) The semiconductor production system according to item (7), wherein,based on the failure position information, the system extracts from thestorage device layout information corresponding to an actual imageobserved by the inspection apparatus and extracts semiconductor circuitlogic information based on the extracted layout information.

(9) The semiconductor production system according to any one of items(7) to (8), wherein the semiconductor inspection apparatus displays aninspection result on a screen.

(10) The semiconductor production system according to any one of items(1) to (9), wherein the storage area network has a computer to generatethe inspection position to reduce a burden on the semiconductorinspection apparatus or the semiconductor manufacturing apparatus.

(11) The semiconductor production system according to item (2), whereinthe plurality of fabrics are interconnected by WAN.

(12) The semiconductor production system according to any one of items(1) to (11), wherein the storage area network stores a requirementspecification of a semiconductor device to be manufactured, informationrepresenting the inspection result, and link information linking theseinformation with an ID of a storage device in which these information isstored.

(13) The semiconductor production system according to any one of items(1) to (12), wherein the storage area network has a display device forcalculating and displaying a processing time or processing position ofthe semiconductor manufacturing apparatus.

(14) The semiconductor production system according to any one of items(1) to (13), wherein the storage area network has an estimating meansfor estimating a performance of a semiconductor device from theinspection result of the semiconductor inspection apparatus.

What is claimed is:
 1. A semiconductor production system comprising: asemiconductor manufacturing apparatus having an exposure unit, a controlunit for controlling the exposure unit and a storage device; asemiconductor inspection apparatus having an observation unit, a controlunit for controlling the observation unit and a storage device; astorage device commonly used by the semiconductor manufacturingapparatus and the semiconductor inspection apparatus; and a storage areanetwork for interconnecting the semiconductor manufacturing apparatus,the semiconductor inspection apparatus and the commonly used storagedevice.
 2. The semiconductor production system according to claim 1,wherein the storage area network has a plurality of fabrics forswitching fiber channels.
 3. The semiconductor production systemaccording to claim 2, wherein the plurality of fabrics areinterconnected by WAN.
 4. The semiconductor production system accordingto claim 1, wherein the commonly used storage device stores image dataand design data.
 5. The semiconductor production system according toclaim 1, wherein the semiconductor manufacturing apparatus manufacturessemiconductors or masks for fabricating the semiconductors.
 6. Thesemiconductor production system according to claim 1, wherein, based onthe design data, the semiconductor manufacturing apparatus generatesinformation on an inspection position at which the semiconductorinspection apparatus performs inspection.
 7. The semiconductorproduction system according to claim 1, wherein the semiconductormanufacturing apparatus has a means for calculating accuracy of amanufacturing process by comparing the design data with shotinformation, the shot information representing a writing patterngenerated based on the design data.
 8. The semiconductor productionsystem according to claim 1, wherein the semiconductor inspectionapparatus executes an inspection based on inspection positioninformation generated by the semiconductor manufacturing apparatus orinspection position information generated by itself, and generatesfailure position information representing a failure position.
 9. Thesemiconductor production system according to claim 8, wherein, based onthe failure position information, the system extracts from the storagedevice layout information corresponding to an actual image observed bythe inspection apparatus and extracts semiconductor circuit logicinformation based on the extracted layout information.
 10. Thesemiconductor production system according to claim 8, wherein thesemiconductor inspection apparatus displays an inspection result on ascreen.
 11. The semiconductor production system according to claim 1,wherein the storage area network has a computer to generate theinspection position to reduce a burden on the semiconductor inspectionapparatus or the semiconductor manufacturing apparatus.
 12. Thesemiconductor production system according to claim 1, wherein thestorage area network stores a requirement specification of asemiconductor device to be manufactured, information representing theinspection result, and link information linking these information withan ID of a storage device in which these information is stored.
 13. Thesemiconductor production system according to claim 1, wherein thestorage area network has a display device for calculating and displayinga processing time or processing position of the semiconductormanufacturing apparatus.
 14. The semiconductor production systemaccording to claim 1, wherein the storage area network has an estimatingmeans for estimating a performance of a semiconductor device from theinspection result of the semiconductor inspection apparatus.